DSA Update
The focus of the directed self-assembly (DSA) discussion at SPIE Advanced Litho has changed. In past years, it has felt more like the efforts were largely about corralling this interesting new wild thing, or even seeing if it could be corralled.
Well, this year it felt more like it’s in the corral, but there’s lots more training to do to make it a well-behaved showhorse. The focus is now on manufacturability. What are the tweaks and changes needed to turn this into a reliable, predictable process?
We’ve covered the < … Read More → "DSA Update"